Chlorosilane Removal 

Hydrogen used in silicon production often ends up contaminated with a chlorosilanes mixture (dichlorosilane, trichlorosilane, and silicon tetrachloride). Chemical Design, Inc. uses a multi vessel, temperature swings adsorption system to remove all the chlorosilanes...

Cryogenic Hydrogen Purification

Chemical Design, Inc.’s Cryogenic Hydrogen Purifiers cool crude hydrogen down to cryogenic temperatures. The hydrogen enters the adsorber vessel where contaminants such as O2, CO, CO2, CH4, water, dopants, argon, and nitrogen are removed down to parts per...

Epitaxial Hydrogen Vent Gas Recovery

The manufacture of silicon crystals generates a vent gas comprised primarily of hydrogen, chlorosilanes, and hydrogen chloride. Chemical Design, Inc.’s process combines compression, cryogenic condensation, catalytic reaction, distillation, ambient adsorption and...